Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS - Wasa, Kiyotaka (Matsushita Electric, Ltd. and Yokohama City University, Japan) - Bøger - William Andrew Publishing - 9781437734836 - 20. november 2012
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Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS 2. udgave

Wasa, Kiyotaka (Matsushita Electric, Ltd. and Yokohama City University, Japan)

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Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS 2. udgave

Faetures a team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. This book introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.


658 pages, black & white illustrations

Medie Bøger     Hardcover bog   (Bog med hård ryg og stift omslag)
Udgivet 20. november 2012
ISBN13 9781437734836
Forlag William Andrew Publishing
Antal sider 660
Mål 239 × 163 × 40 mm   ·   1,04 kg